示例2
Example 2
第一届智能光学设计大赛
The 1st Intelligent Optical Design Competition
应用场景描述
Application Scenarios Description
大赛申报主题：用于微结构晶片检测的光学系统
Theme: Optical System for Investigation of Micro-Structured Wafer
申报人姓名（如多人，请写多个名字）：王欣
Name (If there are multiple people, please write multiple names): Wang Xin
申报单位：讯技光电科技（上海）有限公司
Units: INFOTEK SHANGHAI
应用领域（教育领域 / 科研领域 / 工业领域）: 工业领域
Applications(Education/R&D/Industry)：Industry
应用场景描述：
Application Scenarios Description：
用于微结构晶片检测的光学系统
摘要
在半导体工业中，晶片检测系统被用来检测晶片上的缺陷并找到它们的位置。为了确保微结构所需的图像分辨率，检测系统通常使用高NA物镜，并且工作在UV波长范围内。作为例子，我们建立了包括高NA聚焦和光与微结构相互作用的完整晶片检测系统的模型，并演示了成像过程。
 系统描述
Optical System for Investigation of Micro-Structured Wafer
Abstract
In the semiconductor industry, wafer inspection systems are used to detect defects on a wafer and find their positions. To ensure the necessary image resolution for the microstructures, the inspection system often employs a high-NA objective and works in the UV wavelength range. As an example, a complete wafer inspection system including high-NA focusing and light interaction with microstructures is modeled, and the formation of the image is demonstrated.
System Demonstrate
填写完成后，请将此文件与签字版大赛承诺书一并发送邮件至 virtuallab@infotek.com.cn ，邮件标题与本文件标题请保持一致。
After completing the filling, please send this document along with the signed version of the competition commitment via email to virtuallab@infotek.com.cn, Please keep the email title consistent with this file title.
应用场景描述撰写注意事项：
Notes on writing application scenario description:
1. 我们欢迎任意类型光学系统的投稿，不仅仅局限于该示例。
We welcome any type of optical system, not limited to this examples !
2. 请使用150-250字清晰简洁地描述您的场景，并用通过示意图来展示场景的建模和设计思路。
Please use 150-250 words for a clear and concise description of your scene and an illustration to demonstrate the modeling and design of the scenario.
3. 在您的场景描述或演示中，您需要清楚地描述光源是什么，元件是什么，要测量什么物理量，或者要达到什么目的。
In your scene description or demonstrate, you need to clearly describe what the light source is, what the component is, what the physical quantity is to be measured, or what the purpose is to be achieved.
4. 您的应用场景，需要提交中英文双语版本。
Your application scenario requires submission of bilingual versions in both Chinese and English.
您仅需提交以上信息即可，以下链接为该示例的完整描述，请您参考。
You only need to submit the content of the above information. The following link provides a complete description of the case for your reference:
用于微结构晶片检测的光学系统 - 讯技光电科技(上海)有限公司 (infotek.com.cn) |
